The three-axis table asy/txyz/100/a is characterized by an extremely compact design with two double Torque Blocks^® per axis, enabling active parallel guidance in all three axes.
The z-axis can support loads up to 100 kg with the increased cross section of its Torque-Blocks^® and load-compensation spring.

Main technical features:
- large stroke
- high stiffness
- high loading capacity
- high self-resonant frequencies

	x-axis	y-axis	z-axis
Operating voltage [V-]	400	400	400
Stroke [µm]	100	100	100
Position resolution [nm]	5*	5*	5*
Stiffness [N/µm]	5	5	20
Blocking force [N]	500	500	2000
Loading capacity [N]	±150	±150	+1000 (push) / -500 (pull)
* non-regulated, in regulated operation the sensor resolution applies
Typical resonance frequencies [Hz]
Without load	460	680	910
1 kg load	290	325	680
5 kg load	150	160	315
10 kg load	120	125	220

Application

• Precision positioning under high loads up to 1000 N with precision in the sub-micrometre range
• Three-axis active vibration compensation of high loads, even in frequency ranges <1 Hz

Contact

Actuator Standard Products

PDF Version

Deutsche Version

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